Conception of an Interdigitated Electrodes Based Cantilever for Piezoelectric Energy Harvesting
نویسندگان
چکیده
This paper reports on conception, simulation, and fabrication of a lead zirconate titanate (PZT) MEMS cantilevers for piezoelectric energy harvesting (EH). We investigate the advantages of interdigitated electrode configurations (IDE) with respect to parallel-plate electrodes (PPE) in terms of output voltage and output power from the constitutive equations of piezoelectricity. Finite element modeling was carried for the case of a pull-andrelease mode: PZT IDE structures turn out to be the better candidates for piezoelectric EH. We report about the thin-film deposition of PZT on insulating substrates which yield an effective piezoelectric coefficient eIDE=7C/m 2 . A microfabrication route for IDE piezoMEMS energy harvester is outlined.
منابع مشابه
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